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Innovative Robotics - SCARA ROBOT WAFER TRANSPORT MASK HANDLING IR-820 3-FOUP DUAL WRIST EFEM AHMS 5thaxis flipper vacuum pneumatic Bernoulli non-contact edge grip end-effectors prealigners notch and flat finder and mapping sensors. 50mm 300mm 200-micron-thick thin wafer silicon gallium nitride (GaN).
SCARA, Selectively Compliant, Articulated Robot Arm, 4-axis, dual arm, single arm, dual wrist, end effector, edge gripper, CE compliant, SEMI compliant,
automatic blending, high throughput, small footprint, cost of ownership, COO, 3-axis, R-theta, sorter, sorting, EFEM, Equipment Front End Module, FOUP, Front Opening Unified Pod, FOSB,
Front Opening Shipping Box, cleanroom, Class 1 cleanliness, Class 10 cleanliness, ISO 1 cleanliness, overhaul, retrofit, refurbish
Innovativerobotics.com ~
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